Title :
AlN based piezoelectric force sensor for energy autonomous sensor systems
Author :
Feili, D. ; Barra, M. ; Ziegler, Marcus ; Seidel, H.
Author_Institution :
Dept. of Mechatron., Saarland Univ., Saarbrücken, Germany
Abstract :
This work deals with the design development and test of an AlN based force sensor for an energy autonomous monitoring system. An AlN thin film on an Al2O3 substrate is used as a piezoelectric layer in the sensor system and produces the necessary energy for its operation. Sputtered molybdenum and aluminium layers are used as lower and upper sensing electrodes, respectively. The effects of AlN thickness, electrode thickness, and electrode surface modification on AlN piezoelectric properties are measured. Si3N4 is used to enhance the piezoelectric properties of AlN. Linearity, temperature dependence and repeatability of the sensor are measured and characterised.
Keywords :
alumina; aluminium compounds; electric sensing devices; force sensors; nitrogen compounds; silicon compounds; thin film sensors; Al2O3; AlN; Si3N4; aluminium layer; electrode surface modification; energy autonomous monitoring system; energy autonomous sensor system; piezoelectric force sensor; piezoelectric layer; sputtered molybdenum; thin film; Rough surfaces; Strain; Substrates; Surface roughness; Surface treatment; Temperature measurement; Temperature sensors; AlN; Ceramic; Energy Autonomous Sensors; Force sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969176
