Title :
The electrical behavior of crystal unit resonating at the fundamental frequency 150 MHz
Author :
Tanaka, M. ; Ugajin, T. ; Araki, N. ; Oomura, Y.
Author_Institution :
Meidensha Corp., Tokyo, Japan
Abstract :
In this paper, the 150 MHz rectangular AT-cut quartz crystal units were prepared by photolithography technique. The crystal units were measured precisely by the center line method. In addition, the oscillators equipped with the 150 MHz crystal unit were constructed on trial, and experimental results are shown
Keywords :
ageing; crystal resonators; equivalent circuits; frequency measurement; frequency stability; photolithography; quartz; 150 MHz; SiO2; center line method; crystal unit; electrical behavior; fundamental frequency resonator; photolithography technique; rectangular AT-cut quartz; Chemicals; Electrodes; Etching; Gold; Lithography; Resonant frequency; Rough surfaces; Stability; Surface roughness; Voltage-controlled oscillators;
Conference_Titel :
Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-3309-8
DOI :
10.1109/FREQ.1996.559875
