DocumentCode
2530133
Title
Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors
Author
Droogendijk, H. ; Bruinink, C.M. ; Sanders, R. G P ; Krijnen, G.J.M.
Author_Institution
MESA+ Res. Inst., Univ. of Twente, Enschede, Netherlands
fYear
2011
fDate
5-9 June 2011
Firstpage
2038
Lastpage
2041
Abstract
We report non-degenerate parametric amplification in our biomimetic MEMS hair-based flow-sensors with improved responsivity and sharp filtering through AC-biasing. To the best of our knowledge, this is the first flow sensor with tunable filtering by non-degenerate electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies and achieving highly selective gain of up to 20 dB.
Keywords
biomimetics; flow sensors; micromechanical devices; parametric amplifiers; AC biasing; biomimetic MEMS hair based flow sensor; nondegenerate electromechanical parametric amplification; nonresonant frequency; responsivity; sharp filtering; tunable filtering; Capacitors; Frequency measurement; Gain; Hair; Resonant frequency; Sensors; Softening; MEMS; Parametric amplification; bio-inspired; flow sensor; non-degenerate;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969213
Filename
5969213
Link To Document