DMMP vapor detection with 50NM thick AlN films based microcantilevers

Author

Ivaldi, P. ; Abergel, J. ; Blanc, H. ; Colinet, E. ; Myers, E.B. ; Roukes, M.L. ; Robert, P. ; Andreucci, P. ; Hentz, S. ; Defay, E.

Author_Institution

LETI, CEA, Grenoble, France

fYear

2011

fDate

5-9 June 2011

Firstpage

162

Lastpage

165

Abstract

In this paper, we demonstrate the high sensing performances of a DMMP vapor sensor system based on 50 nm thick AlN film microcantilevers. These devices are particularly interesting for low power integrated gas sensors systems. One key factor for their gas sensing performances optimization relies on the reduction of the AlN layer thickness. Thanks to a digital PLL setup we demonstrate high frequency stability with an Allan deviation of 5.10^-8. Finally, using DKAP polymer for surface functionalization of the cantilever, we measure DMMP vapor concentration down to 25 ppb and predict from frequency noise an ultimate resolution of 10 ppb at the level of the state of the art of DMMP sensing.

Keywords

III-V semiconductors; aluminium compounds; cantilevers; chemical analysis; chemical variables measurement; frequency stability; gas sensors; low-power electronics; microsensors; organic compounds; phase locked loops; polymers; thick film sensors; wide band gap semiconductors; AlN; Allan deviation; DKAP polymer; DMMP vapor concentration measurement; DMMP vapor sensor system; digital PLL setup; low power integrated gas sensor system; noise frequency; optimization; size 50 nm; surface functionalization; thick film microcantilever; Films; Frequency measurement; Gas detectors; Noise; Phase locked loops; Resonant frequency; AlN; DMMP; gravimetric gas sensor; piezoelectric;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969288

Filename

5969288