Nanopore DNA sensors in CMOS with on-chip low-noise preamplifiers

We present an integrated platform for single-molecule electrochemical analysis in which solid-state nanopore sensors are post-fabricated into a custom CMOS preamplifier die. The usable bandwidth of solid-state nanopore sensors is typically constrained by noise caused by parasitic impedances from the sensor´s support substrate and external measurement electronics. By integrating the sensor with a dedicated amplifier we provide a path to significantly reduce these parasitics. The new system includes a low-noise 8-channel preamplifier in a 0.13μm CMOS process. The chip is post-processed to fabricate Ag/AgCl microelectrodes and silicon nitride nanopores.