Deformation analysis of tunable Fabry-Perot structure caused by thermal residual gradient stresses

Author

Chang, Pen-Lun ; Wang, Shun-Wu ; Lin, Meng-Ju

Author_Institution

Dept. of Mech. & Comput.-Aided Eng., Feng Chia Univ., Taichung, Taiwan

fYear

2005

fDate

24-27 July 2005

Firstpage

61

Lastpage

64

Abstract

The deformation of Fabry-Perot caused by thermal residual stresses is investigated. The sizes of structure have effect on deformation, especially the ratio of width to length, W/L. If the W/L ratio is smaller, the deformation is larger. But, the structure could be still considered as flat surface. It only tilts an angle. However, when depositing a material on the structure layer, the structure would no more flat for the mismatch of thermal expansion coefficients inducing larger thermal residual gradient. The results show the structure with larger W/L ratio will be more flat. If the W/L ratio is less than one, the structure is deformed and has less flat part. Even the warpage could happen.

Keywords

deformation; internal stresses; optical filters; thermal expansion; thermal stresses; deformation analysis; thermal expansion coefficient; thermal residual gradient stress; tunable Fabry-Perot filter; Biomembranes; Fabry-Perot; Finite element methods; Mirrors; Optical fiber filters; Optical filters; Residual stresses; Suspensions; Temperature; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on

Print_ISBN

0-7695-2398-6

Type

conf

DOI

10.1109/ICMENS.2005.38

Filename

1540777