DocumentCode :
2532037
Title :
LIGA cavity resonator for K-band applications
Author :
Ma, Z. ; Klymyshyn, D.M. ; Achenbach, S. ; Mohr, J.
Author_Institution :
TRLabs, Saskatoon, Sask., Canada
fYear :
2005
fDate :
24-27 July 2005
Firstpage :
106
Lastpage :
109
Abstract :
A 2-mm deep microwave cavity resonator is proposed for UGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q) factor. Simulation using 3-D finite element method (FEM) shows an unloaded Q (Qu) very close to the theoretical calculation. Feasibility of obtaining such cavities with hard X-ray lithography (XRL) is demonstrated.
Keywords :
LIGA; Q-factor; cavity resonators; finite element analysis; microwave devices; 3D finite element method; K-band applications; LIGA cavity resonator; UGA microfabrication; deep microwave cavity resonator; hard X-ray lithography; quality factor; smooth sidewalls; Cavity resonators; Circuits; Etching; Frequency; K-band; Optical resonators; Q factor; Rough surfaces; Silicon; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
Type :
conf
DOI :
10.1109/ICMENS.2005.65
Filename :
1540790
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2532037
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