Ultrasensitive dielectric filled Lamé mode biomass sensor

Author

Heidari, Amir ; Yoon, Yong-Jin ; Park, Mi Kyoung ; Park, Woo-Tae ; Lin, Julius Tsai Ming

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2011

fDate

5-9 June 2011

Firstpage

2259

Lastpage

2262

Abstract

A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000 and the mass sensitivity of -400 Hz/pg. The resonators were fabricated using the silicon-on-insulator MEMS process.

Keywords

bioMEMS; biosensors; bulk acoustic wave devices; dielectric materials; elemental semiconductors; mass measurement; micromachining; microsensors; silicon-on-insulator; Lame bulk acoustic resonant mode; Lame mode biomass sensor; frequency 37.8 MHz; high performance biomass sensor; high quality output signal; micromachined silicon squared plate; silicon on insulator MEMS process; small biological agent detection; ultrasensitive dielectric; Biosensors; Electrodes; Fabrication; Optical resonators; Resonant frequency; Sensitivity; Silicon; Biosensor; capacitive filled gap transducer; mass sensitivity; motional resistance; quality factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969338

Filename

5969338