Title :
Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides
Author :
Ay, F. ; Kauppinen, L.J. ; Bradley, J.D.B. ; Wörhoff, K. ; de Ridder, R.M. ; Pollnau, M.
Author_Institution :
Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
Abstract :
Reflection gratings on Al2O3 channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers.
Keywords :
Fabry-Perot resonators; alumina; annealing; diffraction gratings; erbium; focused ion beam technology; integrated optics; laser cavity resonators; microcavities; milling; nanofabrication; nanophotonics; nanostructured materials; optical fabrication; optical waveguide components; solid lasers; waveguide lasers; Al2O3:Er3+; Fabry-Perot microcavity fabrication; annealing; channel waveguide lasers; focused ion beam milling; on-chip resonator nanostructures; rare-earth-ion-doped active waveguides; reflection grating; Aluminum oxide; Gratings; Ion beams; Milling; Nanostructures; Optical reflection; Optical resonators; Optical waveguides; Particle beam optics; Waveguide lasers;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343113
