DocumentCode
2534728
Title
Self-oscillation of micromechanical resonators
Author
Höhberger, C.C. ; Karrai, K.
Author_Institution
Center for NanoSci., Ludwig-Maximilians-Univ., Munchen, Germany
fYear
2004
fDate
16-19 Aug. 2004
Firstpage
419
Lastpage
421
Abstract
In this paper, we describe the self-oscillation of a mirror due to light-induced force gradients. A Fabry-Perot microcavity in which one of the mirrors is a soft compliant gold coated microlever is used to demonstrate amplitude amplification by monochromatic laser light. Depending on the phase difference in the cavity the vibrational amplitude of the mirror could be heated using CW laser light. The mechanical quality factor of the resonator could be tuned from its natural value of about 365 up to more than 3600.
Keywords
Fabry-Perot resonators; Q-factor; amplification; cavity resonators; micromechanical resonators; Fabry-Perot microcavity; amplitude amplification; gold coated microlever; light-induced force gradients; mechanical quality factor; micromechanical resonators; monochromatic laser light; self-oscillation; vibrational amplitude; Atomic force microscopy; Damping; Gold; Laser tuning; Micromechanical devices; Mirrors; Optical resonators; Q factor; Thermal force; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN
0-7803-8536-5
Type
conf
DOI
10.1109/NANO.2004.1392370
Filename
1392370
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