DocumentCode
2535110
Title
Crack propagation direction control for crack-less solder bonding using Al/Ni flash heating technique
Author
Namazu, T. ; Ohtani, K. ; Yoshiki, K. ; Inoue, S.
Author_Institution
Dept. of Mech. & Syst. Eng., Univ. of Hyogo, Himeji, Japan
fYear
2011
fDate
5-9 June 2011
Firstpage
1368
Lastpage
1371
Abstract
In this article, a new technique for controlling crack position and its propagation direction in solder-bonding using Al/Ni exothermic reaction is described. Sputtered Al/Ni multilayer film is able to produce heat instantly by its self-propagating exothermic reaction, and the reactive film can be used as heat source for solder-bonding. During the reaction, however, volume reduction by approximately 12% occurs due to crystal structural change from fcc to bcc and lattice-spacing reduction. Consequently, cracks are produced in the reacted NiAl structure. The cracks negatively affect the strength of the bonded system. We have found a new technique for controlling crack position and its propagation direction. Multiple ignitions for reaction demonstrated that cracks in reacted NiAl film can be controlled. When applying the flash heating technique to wafer-level bonding, cracks are probably produced. If cracks can be fabricated on dicing cut lines by using the simultaneous multiple reactions technique, crack-less solder-bonded Si hermetic packages would be realized.
Keywords
aluminium alloys; cracks; electronics packaging; fracture; heating; hermetic seals; micromechanical devices; nickel alloys; soldering; sputtered coatings; wafer bonding; Al-Ni; Si; crack propagation direction control; crackless solder bonding; flash heating technique; hermetic package; self-propagating exothermic reaction; sputtered multilayer film; wafer level bonding; Films; Heating; Ignition; Micromechanical devices; Nickel; Silicon; Soldering; Al/Ni exothermic reaction; crack; packaging; soldering; sputtering; volume reduction;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969524
Filename
5969524
Link To Document