• DocumentCode
    2535110
  • Title

    Crack propagation direction control for crack-less solder bonding using Al/Ni flash heating technique

  • Author

    Namazu, T. ; Ohtani, K. ; Yoshiki, K. ; Inoue, S.

  • Author_Institution
    Dept. of Mech. & Syst. Eng., Univ. of Hyogo, Himeji, Japan
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    1368
  • Lastpage
    1371
  • Abstract
    In this article, a new technique for controlling crack position and its propagation direction in solder-bonding using Al/Ni exothermic reaction is described. Sputtered Al/Ni multilayer film is able to produce heat instantly by its self-propagating exothermic reaction, and the reactive film can be used as heat source for solder-bonding. During the reaction, however, volume reduction by approximately 12% occurs due to crystal structural change from fcc to bcc and lattice-spacing reduction. Consequently, cracks are produced in the reacted NiAl structure. The cracks negatively affect the strength of the bonded system. We have found a new technique for controlling crack position and its propagation direction. Multiple ignitions for reaction demonstrated that cracks in reacted NiAl film can be controlled. When applying the flash heating technique to wafer-level bonding, cracks are probably produced. If cracks can be fabricated on dicing cut lines by using the simultaneous multiple reactions technique, crack-less solder-bonded Si hermetic packages would be realized.
  • Keywords
    aluminium alloys; cracks; electronics packaging; fracture; heating; hermetic seals; micromechanical devices; nickel alloys; soldering; sputtered coatings; wafer bonding; Al-Ni; Si; crack propagation direction control; crackless solder bonding; flash heating technique; hermetic package; self-propagating exothermic reaction; sputtered multilayer film; wafer level bonding; Films; Heating; Ignition; Micromechanical devices; Nickel; Silicon; Soldering; Al/Ni exothermic reaction; crack; packaging; soldering; sputtering; volume reduction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969524
  • Filename
    5969524