Rapid non-lithography based fabrication process and characterization of Parylene C bellows for applications in MEMS electrochemical actuators

We present a rapid (1 day), modular, high-yield (~90%) fabrication process for Parylene C bellows and their mechanical characterization. Load-deflection testing was performed on bellows of varying convolution numbers (1.0, 2.0, and 3.0) and compared to both finite element modeling (FEM) simulations and an analytical model based on membrane deflection theory. Bellows produced a consistent load response. Actuators (consisting of electrodes, electrolyte, and bellows) were assembled and then integrated into a polydimethylsiloxane (PDMS, or silicone rubber) drug reservoir. Preliminary results indicate accurate (<; 5% error) drug delivery during repeated dosing at constant flow rate (3.75 μL/min, 2.0 convolution bellows, 1 mA constant current).