Simple and low-cost patterning of carbon nanotube on PDMS for flexible MEMS

In this paper, we have proposed and demonstrated a simple and low-cost fabrication technique to pattern carbon nanotube (CNT) film on PDMS which is useful for flexible sensors and electronics. We demonstrated the CNT patterning on the flat PDMS surface using standard photolithography method. The proposed technique produces a CNT film on PDMS with high flexibility and good conductivity. The resulting CNT patterning with a minimal feature resolution of 300 μm have been achieved by using proposed fabrication technique. Also, the sheet resistance of CNT film on the PDMS was measured in the 100-280 Ω/sq range. In addition, the thickness and a resultant resistivity of CNT film can be easily controlled by just controlling spray time.