Step and flash nanoimprint lithography in Europe

Nanoimprint lithography is a technology which has been developed during the last decade for achieving structures in the nanometer range. The authors show a short overview of the mainstream processes and work out the advantages of the step and flash imprint lithography (S-FIL). Process results reached at Molecular Imprint Inc. (MII), Austin, Texas, confirm these theses. A comparison is done between optical lithography and the different imprint techniques. Thereby (S-FIL) is the most attractive technology enabling low cost lithography in the nanometer range.