Title :
Micro disk resonator with on-disk piezoelectric thin film transducers for integrated MEMS ubiquitous applications
Author :
Lu, J. ; Zhang, Y. ; Itoh, T. ; Maeda, R.
Author_Institution :
Res. Center for Ubiquitous MEMS & Micro Eng. (UMEMSME), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power consumption. By optimizing the size, location of the PZT-electrode stacks, and the layout of the silicon disk to compress energy dissipation, dramatically improved quality-factor (Q-factor) was achieved both in air (Q=1319) and under reduced pressure (Q=5028 at the pressure of 300Pa).
Keywords :
CMOS integrated circuits; impedance matching; lead compounds; micromechanical resonators; microsensors; piezoelectric transducers; wireless sensor networks; zirconium compounds; CMOS integrated circuit; PZT; disk self-actuation; impedance matching; integrated MEMS; micro disk resonator; microelectromechanical systems; on-disk piezoelectric thin film transducer; pressure 300 Pa; self-sensing; ubiquitous applications; wireless sensor network; Energy dissipation; Layout; Micromechanical devices; Q factor; Silicon; Transducers; Wireless sensor networks; MEMS; PZT; disk resonator; piezoelectric transducer; quality-factor; wireless sensor network;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969669
