Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing characteristics

We developed a new disk resonator which has high quality factor, highly efficient mass detection ability, and area-effective layout. High quality factor was achieved by minimizing support loss using nodal-point position control on the structural design. Sensing platform in the center hole provides wide and high-sensitive mass detection area. We also developed an oscillation circuit using impedance transform circuit which is suitable to MEMS resonators with high motional impedance. Toluene gas detection was demonstrated using this oscillator.