• DocumentCode
    2537945
  • Title

    Opto-acoustic oscillator using silicon MEMS optical modulator

  • Author

    Sridaran, Suresh ; Bhave, Sunil A.

  • Author_Institution
    OxideMEMS Lab., Cornell Univ., Ithaca, NY, USA
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    2920
  • Lastpage
    2923
  • Abstract
    We show operation of a silicon MEMS based narrow-band optical modulator with large modulation depth by improving the electro-mechanical transducer. We demonstrate an application of the narrowband optical modulator as both the filter and optical modulator in an opto-electronic oscillator loop to obtain a 236.22 MHz Opto-Acoustic Oscillator (OAO) with phase noise of -68 dBc/Hz at 1 kHz offset.
  • Keywords
    electromechanical effects; elemental semiconductors; micromechanical devices; optical modulation; oscillators; phase noise; photoacoustic effect; silicon; MEMS based narrowband optical modulator; OAO; Si; electro-mechanical transducer; frequency 236.22 MHz; opto-acoustic oscillator; phase noise; Optical filters; Optical modulation; Optical resonators; Optical scattering; Oscillators; Radio frequency; MEMS based Optical Modulator; Opto-Acoustic Oscillator; Optomechanics; RF MEMS resonator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969691
  • Filename
    5969691