Title :
Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy
Author :
Mitsuishi, I. ; Ezoe, Y. ; Ishizu, K. ; Moriyama, T. ; Mita, M. ; Yamasaki, N.Y. ; Mitsuda, K. ; Horade, M. ; Sugiyama, S. ; Riveros, R. ; Yamaguchi, H. ; Kanamori, Y. ; Morishita, K. ; Nakajima, K. ; Maeda, R.
Author_Institution :
ISAS, JAXA, Japan
Abstract :
We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.
Keywords :
X-ray sources (astronomical); micromechanical devices; space vehicles; surface roughness; DRIE; X-ray focusing; annealing; high-resolution MEMS X-ray optics; imaging quality; magnetic field; micromachined X-ray optics; micromirrors; space astronomical mission; space astronomy; surface roughness; ultralightweight; Focusing; Micromechanical devices; Mirrors; Silicon; Surface roughness; X-ray imaging; MEMS; X-ray; optics; space astronomy;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969715
