Title :
1-D electro-optic beam steering device
Author :
Wang, Wei-Chih ; Tsui, Chi Leung ; Wu, Menglu
Author_Institution :
Dept. of Mech. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
In this paper, we present the design and fabrication of a 1D beam steering device based on a planar electro-optic thermal-plastic prisms and a collimator lens array. With the elimination of moving parts, the proposed device is able to resolve the mechanical limitations of present scanning devices, such as fatigue and low operating frequency, while maintaining a small system footprint (~0.5mm×0.5mm). Simulation and fabrication process of the device is presented. Device operation is observed and measured. From experiment, our prototype device is able to achieve a maximum deflection angle of 5.6° and a a 4μm collimated beam diameter.
Keywords :
beam steering; electro-optical devices; lenses; micro-optics; microfabrication; micromechanical devices; optical collimators; optical prisms; optical scanners; 1D electrooptic beam steering device; collimated beam diameter; collimator lens array; planar electrooptic thermal-plastic prism; size 4 mum; Arrays; Collimators; Electrooptic deflectors; Laser beams; Lenses; Polymers; Substrates; Electro-optic; beam steering; optical MEMS; thermal-plastic;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969741