Title :
Table top ultraviolet lasers enable new nano-patterning schemes
Author :
Marconi, M.C. ; Urbanski, L. ; Wachulak, P. ; Isoyan, A. ; Jiang, F. ; Cheng, Y. ; Rocca, J.J. ; Menoni, C.S. ; Cerrina, F.
Author_Institution :
Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO, USA
Abstract :
We present results with different nanopatterning techniques using table top extreme ultraviolet lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography.
Keywords :
Talbot effect; holography; laser materials processing; nanolithography; nanopatterning; nanophotonics; photolithography; Talbot self imaging; holographic projection lithography; interferometric lithography; nanopatterning techniques; table top extreme ultraviolet lasers; Atomic force microscopy; Holographic optical components; Holography; Interferometric lithography; Laser theory; Nanopatterning; Optical imaging; Optical interferometry; Resists; Ultraviolet sources;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343472
