Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

Author

Meinig, M. ; Ebermann, M. ; Neumann, N. ; Kurth, S. ; Hiller, K. ; Gessner, T.

Author_Institution

Fraunhofer ENAS, Chemnitz, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

2538

Lastpage

2541

Abstract

A tunable dual-band MEMS Fabry-Pérot filter for simultaneous use of the spectral ranges from 8 μm to 10.5 μm and from 4 μm to 5 μm is reported. A peak transmittance of at least 75% and a FWHM of less than 200 nm were measured. The maximum control voltage is 41 V. Two movable reflector carriers compensate the influence of gravitational force on the central wavelength. The device can withstand mechanical shocks according to Mil-Std-883G, method 2002.4, test condition B. The filter is integrated in a tiny, robust and fast microspectrometer module with the size of a TO-8 housing.

Keywords

infrared spectrometers; infrared spectroscopy; interference filters; interference spectrometers; mechanical testing; micro-optomechanical devices; vibrations; FWHM; TO-8 housing; gravitational force influence compensate; long-wave infrared microspectrometer; mechanical shocks; mid-wave infrared microspectrometer; movable reflector; peak transmittance; tunable dual band MEMS Fabry-Perot filter; wavelength 4 mum to 5 mum; wavelength 8 mum to 10.5 mum; Band pass filters; Dielectrics; Dual band; Micromechanical devices; Mirrors; Optical filters; Optical reflection; Fabry-Pérot interferometer; Infrared filter; LWIR; MWIR; dual-band; microspectrometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969764

Filename

5969764