Implementation and analysis of microwave switch in CMOS-MEMS technology

Author

Hsu, Heng-Ming ; Dai, Ching-Liang ; Hsieh, Ming-Ming ; Tsai, Ming-Chang ; Peng, Hsuan-Jung

Author_Institution

Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung

fYear

2006

fDate

21-24 May 2006

Abstract

The fabrication of a micro-machined microwave switch using the standard 0.35mum CMOS process and the post-process by wet etching without extra mask is implemented in this work. The components of the microwave switch are coplanar waveguide (CPW) transmission lines, a suspended membrane and supported springs. Experimental results show that the driving voltage of the switch approximates to 17 V. The switch has an insertion loss of -1.5 ~ -2.5dB and an isolation of -5 ~ -15 dB between 30 ~ 50 GHz. Moreover, an equivalent circuit is proposed to analyse the performance of this switch

Keywords

CMOS integrated circuits; coplanar waveguides; etching; micromechanical devices; microwave switches; 0.35 micron; 50 GHz; CMOS; MEMS; coplanar waveguide; extra mask; microwave switch; wet etching; CMOS process; CMOS technology; Coplanar transmission lines; Coplanar waveguides; Distributed parameter circuits; Fabrication; Microwave technology; Switches; Waveguide components; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2006. ISCAS 2006. Proceedings. 2006 IEEE International Symposium on

Conference_Location

Island of Kos

Print_ISBN

0-7803-9389-9

Type

conf

DOI

10.1109/ISCAS.2006.1693077

Filename

1693077