A new approach of a shape-optimized piezoelectric MEMS generator for fluid-actuated energy scavenging

Author

Kuehne, I. ; Seidel, J. ; Schreiter, M. ; Seidel, H. ; Frey, A.

Author_Institution

Corp. Res. & Technol., Siemens AG, Munich, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

671

Lastpage

674

Abstract

In this paper a new approach of a shape-optimized piezoelectric MEMS generator for fluid-actuated energy scavenging is presented. Different energy scavenging scenarios are introduced. Depending on the specific load scenario optimum piezoelectric cantilever shapes are investigated. A point load at the free-end of a cantilever requires a triangular cantilever shape. Compared to a classical rectangular shape the electrical area energy density is three times larger. A maximum area energy density value of 35 nJ/mm² is measured for the triangular cantilever shapes. A uniform load as occurring for fluid-actuated energy harvesting calls for a triangular-curved cantilever shape and is also superior to classical geometries.

Keywords

cantilevers; energy harvesting; vibrations; fluid-actuated energy scavenging; shape-optimized piezoelectric MEMS generator; triangular cantilever shapes; Energy harvesting; Finite element methods; Force; Generators; Micromechanical devices; Shape; Stress; MEMS generator; energy scavenging; fluid-actuation; non-resonant excitation; piezoelectric;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969843

Filename

5969843