DocumentCode
2540922
Title
A hierarchical approach for the fabrication of three-dimensional microbattery electrodes
Author
Gerasopoulos, K. ; Pomerantseva, E. ; McCarthy, M. ; Culver, J. ; Wang, C. ; Ghodssi, R.
Author_Institution
MEMS Sensors & Actuators Lab., Univ. of Maryland, College Park, MD, USA
fYear
2011
fDate
5-9 June 2011
Firstpage
727
Lastpage
730
Abstract
The first successful demonstration of virus-structured, hierarchical electrodes for three-dimensional (3-D) Li-ion microbattery architectures is reported in this paper. The electrodes consist of electroplated gold micropillars and virus-structured nanocomposite materials with a TiO2 anode layer deposited on a nickel-coated viral template. Micropatterning increases the active electrode surface area and electrochemical characterization results verify an improvement in microbattery capacity by up to a factor of four compared to nanostructures alone.
Keywords
electrochemical electrodes; lithium; microfabrication; micromechanical devices; nanocomposites; secondary cells; titanium compounds; Li; TiO2; anode layer; electroplated gold micropillar; microfabrication; micropatterning; nickel-coated viral template; three-dimensional microbattery electrode; virus-structured hierarchical electrode; virus-structured nanocomposite material; Batteries; Electrodes; Fabrication; Nanobioscience; Nanostructures; Silicon; Microbatteries; hierarchical; nanostructures; templates; virus;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969856
Filename
5969856
Link To Document