• DocumentCode
    2540922
  • Title

    A hierarchical approach for the fabrication of three-dimensional microbattery electrodes

  • Author

    Gerasopoulos, K. ; Pomerantseva, E. ; McCarthy, M. ; Culver, J. ; Wang, C. ; Ghodssi, R.

  • Author_Institution
    MEMS Sensors & Actuators Lab., Univ. of Maryland, College Park, MD, USA
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    727
  • Lastpage
    730
  • Abstract
    The first successful demonstration of virus-structured, hierarchical electrodes for three-dimensional (3-D) Li-ion microbattery architectures is reported in this paper. The electrodes consist of electroplated gold micropillars and virus-structured nanocomposite materials with a TiO2 anode layer deposited on a nickel-coated viral template. Micropatterning increases the active electrode surface area and electrochemical characterization results verify an improvement in microbattery capacity by up to a factor of four compared to nanostructures alone.
  • Keywords
    electrochemical electrodes; lithium; microfabrication; micromechanical devices; nanocomposites; secondary cells; titanium compounds; Li; TiO2; anode layer; electroplated gold micropillar; microfabrication; micropatterning; nickel-coated viral template; three-dimensional microbattery electrode; virus-structured hierarchical electrode; virus-structured nanocomposite material; Batteries; Electrodes; Fabrication; Nanobioscience; Nanostructures; Silicon; Microbatteries; hierarchical; nanostructures; templates; virus;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969856
  • Filename
    5969856