Title :
MEMS technology development and manufacturing in a CMOS foundry
Author :
Liu, CM ; Chou, Bruce C S ; Tsai, Robert Chin-Fu ; Shen, Nick Y M ; Chen, Benior SF ; Cheng, Emerson CW ; Tuan, Hsiao Chin ; Kalnitsky, Alex ; Cheng, Sean ; Lin, Chung-Hsien ; Chung, Tien-Kan ; Chang, Kuei-Sung ; Liu, Yi-Shao
Author_Institution :
Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan
Abstract :
MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.
Keywords :
foundries; microsensors; CMOS foundry; MEMS manufacturing; MEMS technology development; TSMC-MEMS platform; motion sensors; Bonding; CMOS integrated circuits; Micromechanical devices; Plasmas; Sensors; Silicon; CMOS-MEMS; MEMS Foundry Service;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969891
