DocumentCode :
2545761
Title :
System Design And Operation Of A 100 Kilovolt, 2 Kilohertz Pulse Modulator For Plasma Source Ion Implantation
Author :
Reass, William A.
Author_Institution :
Los Alamos National Laboratory
fYear :
1994
fDate :
27-30 Jun 1994
Firstpage :
5
Lastpage :
8
Keywords :
Automotive components; Circuit testing; Impedance; Implants; Ion implantation; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma sources; Pulse modulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Power Modulator Symposium, 1994., Twenty-First International
ISSN :
1076-8467
Type :
conf
DOI :
10.1109/MODSYM.1994.597027
Filename :
597027
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2545761
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