Title :
Critical process issues in selenization
Author :
Verma, S. ; Varrin, R.D., Jr. ; Birkmire, R.W. ; Russel, T.W.F.
Author_Institution :
Inst. of Energy Conversion, Delaware Univ., Newark, DE, USA
Abstract :
Both H2Se and elemental selenium are used to form copper-indium diselenide. Equilibrium thermodynamic calculations for H 2Se dissociation show that the higher-order Sex species (Se5, Se6, Se7) are important at temperatures below 800 K, whereas Se2 becomes the predominant species at temperatures above 900 K. A kinetic model is presented for the decomposition of H2Se. The reaction is found to be first order at short times, but the reverse reaction of Se x with H2 assumes importance at higher conversions and longer times. The constants in the kinetic model are calculated
Keywords :
chemical vapour deposition; copper compounds; indium compounds; semiconductor growth; semiconductor thin films; ternary semiconductors; CuInSe2; H2Se dissociation; decomposition; equilibrium thermodynamic calculations; kinetic model; semiconductor; Copper; Energy measurement; Equations; Hydrogen; Indium; Inductors; Kinetic theory; Phase measurement; Temperature; Thermodynamics;
Conference_Titel :
Photovoltaic Specialists Conference, 1991., Conference Record of the Twenty Second IEEE
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-87942-636-5
DOI :
10.1109/PVSC.1991.169342