• DocumentCode
    2549986
  • Title

    Stimulation of diamond growth on optically transparent non-conductive substrates

  • Author

    Kadlecikova, M. ; Breza, J. ; Vesely, M. ; Luptakova, V. ; Balon, F. ; Vojackova, A. ; Kral, J. ; Janik, J. ; Kromka, A.

  • Author_Institution
    Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia
  • fYear
    2002
  • fDate
    14-16 Oct. 2002
  • Firstpage
    235
  • Lastpage
    238
  • Abstract
    Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.
  • Keywords
    Raman spectra; chemical vapour deposition; diamond; elemental semiconductors; semiconductor growth; semiconductor thin films; AC biasing; Al2O3; C; Raman spectroscopy; diamond grain seeding; diamond layers; glass substrates; hot filament CVD; optically transparent nonconductive substrates; sapphire substrates; Atomic layer deposition; Atomic measurements; Chemical vapor deposition; Hydrogen; Optical films; Plasma temperature; Powders; Rough surfaces; Stimulated emission; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on
  • Print_ISBN
    0-7803-7276-X
  • Type

    conf

  • DOI
    10.1109/ASDAM.2002.1088515
  • Filename
    1088515
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2549986