Title :
Influence of non-confined electrons at the boundaries in a HPPMS discharge - limit to gyro-average validity
Author :
Gallian, Sara ; Eremin, Denis ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter
Author_Institution :
Ruhr University Bochum, D-44780, Germany
Abstract :
Summary form only given. High Power Pulsed Magnetron Sputtering (HPPMS) is a novel Ionized Physical Vapor Deposition (IPVD) technique, able to achieve an ultra dense plasma with a high ionization degree of sputtered atoms.
Keywords :
Atomic clocks; Chemical vapor deposition; Discharges (electric); Educational institutions; Ionization; Plasmas; Sputtering;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383361
