Title :
Laser microspectral analysis of composition of multilayerfd coatings of cathodes in electronic devices
Author :
Surmeitko, E.L. ; Sokolova, T.N. ; Konyushin, A.V.
Keywords :
Cathodes; Coatings; Nonhomogeneous media; Sampling methods;
Conference_Titel :
Actual Problems of Electron Devices Engineering, 2004. APEDE 2004. International Conference on
Print_ISBN :
0-7803-8442-3
DOI :
10.1109/APEDE.2004.1393590