DocumentCode :
2558154
Title :
2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)
fYear :
2004
fDate :
9-10 Sept. 2004
Abstract :
The following topics are dealt with: manufacturing logistics; CIM; production management; yield enhancement; advanced industrial processes; and process control.
Keywords :
computer integrated manufacturing; control engineering computing; logistics; process control; production engineering computing; semiconductor device manufacture; CIM; advanced industrial processes; computer integrated manufacturing; manufacturing logistics; process control; production management; yield enhancement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Conference_Location :
Hsinchu
Print_ISBN :
0-7803-8469-5
Type :
conf
DOI :
10.1109/SMTW.2004.1393686
Filename :
1393686
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2558154
بازگشت