DocumentCode :
2558940
Title :
A tool portfolio elimination mechanism (TPEM) for a wafer fab
Author :
Chung, Shu-Hsing ; Hsieh, Ming-Hsiu ; Liu, Jui-Chun
Author_Institution :
Dept. of Ind. Eng. & Manage., Nat. Chiao Tung Univ., Taiwan
fYear :
2004
fDate :
9-10 Sept. 2004
Firstpage :
51
Lastpage :
53
Abstract :
Wafer manufacturers usually face critical problems when making decisions regarding to the tool portfolio elimination, mainly due to the dramatic and frequent influences from their internal and external environments. This work is aimed to develop a mechanism, named tool portfolio elimination mechanism (TPEM), to evaluate the impacts on production performance and capital expenditure, and to determine which equipment is suitable for pruning. In TPEM, there are four stages to decide tool portfolio elimination according to the PDCA cycle. Meanwhile, the simulation results show that the fab production performance and cost are much improved by the TPEM algorithm. Especially, it can be applied and implemented to industry very quickly and easily.
Keywords :
decision making; investment; production equipment; semiconductor device manufacture; tools; PDCA cycle; TPEM; decision making; tool portfolio elimination mechanism; wafer fab; wafer manufacturers; Costs; Engineering management; Environmental management; Foundries; Industrial engineering; Manufacturing industries; Manufacturing processes; Portfolios; Preventive maintenance; Production;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Print_ISBN :
0-7803-8469-5
Type :
conf
DOI :
10.1109/SMTW.2004.1393716
Filename :
1393716
Link To Document :
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