Title :
Design and fabrication of micromachined tunneling accelerometers with micro-g resolution and their comparison
Author :
Patra, S. ; Bhattacharyya, Tarun Kanti
Author_Institution :
Electron. & Electr. Commun. Eng. Dept., Indian Inst. of Technol., Kharagpur, India
Abstract :
The paper presents implementation of several surface micromachined tunneling accelerometer structures. This work also records the study of their relative performance in order to achieve high sensitivity and high dynamic range for mu-g measurement with low cross axis sensitivity.
Keywords :
accelerometers; micromachining; low cross axis sensitivity; micro-g resolution; mu-g measurement; surface micromachined tunneling accelerometer structure; Acceleration; Accelerometers; Current measurement; Dynamic range; Electrodes; Electrons; Fabrication; Paper technology; Tunneling; Voltage; Crab leg beam; Folded beam; High dynamic range; Low cross axis sensitivity and Tunneling accelerometer;
Conference_Titel :
Electron Devices and Semiconductor Technology, 2009. IEDST '09. 2nd International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-3831-0
Electronic_ISBN :
978-1-4244-3832-7
DOI :
10.1109/EDST.2009.5166120
