• DocumentCode
    2559980
  • Title

    Real-time fault detection and condition monitoring system for chiller

  • Author

    Chang, Wen-Yao ; Wang, Tzu-Chi ; Shin, Yuan-Pin

  • Author_Institution
    Center for Environ., Safety & Health Technol. Dev., Ind. Technol. Res. Inst., Hsinchu
  • fYear
    2004
  • fDate
    10-10 Sept. 2004
  • Firstpage
    160
  • Lastpage
    165
  • Abstract
    Predictive maintenance and increase on equipment effectiveness could be carried out by the equipment condition monitoring system (ECMS). The designing procedures of ECMS from failure analysis, monitoring method, monitoring steps, to maintenance strategy are presented in this paper. The maintenance strategies could be divided into three kind of category and four level architectures. Six kinds of monitoring methods, such as chiller performance coefficient monitoring, element efficiency monitoring, performance monitoring, data limit monitoring, vibration monitoring and current signature monitoring, are also discussed in this paper
  • Keywords
    condition monitoring; cooling; fault diagnosis; preventive maintenance; production equipment; semiconductor device manufacture; chiller performance coefficient monitoring; current signature monitoring; data limit monitoring; element efficiency monitoring; equipment condition monitoring system; failure analysis; predictive maintenance; real-time fault detection; vibration monitoring; Artificial neural networks; Brushless DC motors; Condition monitoring; Equations; Failure analysis; Fault detection; Manufacturing processes; Real time systems; Semiconductor device manufacture; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing Technology Workshop Proceedings, 2004
  • Conference_Location
    Hsinchu
  • Print_ISBN
    0-7803-8469-5
  • Type

    conf

  • DOI
    10.1109/SMTW.2004.1393755
  • Filename
    1393755