Title :
Management considerations in choosing a chemical supply system
Author :
Tsai, Chun-Hung ; Lin, Yu-Chung ; Hsu, Chuen-Tun ; Cheng, Rang-Tian ; Chang, Chung-Chieh ; Lin, Yung-Chao ; Chao, Po-Jen
Author_Institution :
United Microelectron. Corp., Hsinchu
Abstract :
This paper discusses considerations in choosing a chemical supply system for semiconductor fabs. We investigate the characteristics of three major supply systems, drum, lorry and dilution system. The initial costs and footprints are totally different among them. Based on the cost analysis, this paper provides a simple criterion of using the lorry supply system. Besides discussion, information of leading fabs in each field is benchmarked in this paper
Keywords :
cost-benefit analysis; manufacturing systems; semiconductor device manufacture; supply chain management; chemical supply system; dilution system; drum supply system; lorry supply system; semiconductor fabrication; Chaos; Chemical industry; Chemical processes; Costs; Foundries; Manufacturing processes; Microelectronics; Random access memory; Risk management; Waste management;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Conference_Location :
Hsinchu
Print_ISBN :
0-7803-8469-5
DOI :
10.1109/SMTW.2004.1393762
