Title :
Experimental and theoretical investigation of technological process of obtaining of metals oxide and nitride coatings by using high-voltage gas-discharge electron beam evaporator
Author :
Denbnovetsky, S.V. ; Melnyk, V.I. ; Melnyk, I.V. ; Porytskyy, P.V.
Author_Institution :
Fac. of Electron., Kiev Polytech. Inst., Ukraine
Abstract :
A method of deposition of metals oxide and nitride coatings using glow discharge electron guns is discussed. A scheme of technological equipment to realise this process is represented and assignment of its major details is described. Technological parameters of elaborated equipment is pointed out. A mathematical model of the realised technological process is proposed and obtained results of simulation is discussed and verified with experimental measurements
Keywords :
coating techniques; coatings; electron beam deposition; electron guns; glow discharges; glow discharge electron guns; high-voltage gas-discharge electron beam evaporator; mathematical model; metals oxide deposition; nitride coatings deposition; technological parameters; technological process; Cathodes; Ceramics; Chemicals; Coatings; Electron beams; Electron guns; Gases; Glow discharges; Nuclear electronics; Surface discharges;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2000. Proceedings. ISDEIV. XIXth International Symposium on
Conference_Location :
Xi´an
Print_ISBN :
0-7803-5791-4
DOI :
10.1109/DEIV.2000.879048
