DocumentCode
2566431
Title
Micro electro-discharge machining and its applications
Author
Masaki, Takeshi ; Kawata, Koichi ; Masuzawa, Takahisa
Author_Institution
Matsushita Res. Inst. Tokyo Inc., Kanagawa, Japan
fYear
1990
fDate
11-14 Feb 1990
Firstpage
21
Lastpage
26
Abstract
A micro electro-discharge machining (MEDM) technology is presented. It allows machining of micro holes and shafts as small as 5 μm in diameter with a best surface roughness of 0.1 μm R max and of roundness of 0.5 μm, as well as a variety of complex shapes of equivalent accuracy. In the MEDM, machining for silicon with 10-100 Ω-cm resistivity is possible; machining up to a depth of 10 times the electrode diameter is easy, and the electrode wear is small. A prototype microair turbine of 2.2 mm external diameter, which is able to rotate at a speed of approximately 1000 r.p.m., is discussed
Keywords
spark machining; surface topography; MEDM; Si; electrode wear; micro electro-discharge machining; micro holes; microair turbine; roundness; surface roughness; Conductivity; Electrodes; Machining; Prototypes; Rough surfaces; Shafts; Shape; Silicon; Surface roughness; Turbines;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Napa Valley, CA
Type
conf
DOI
10.1109/MEMSYS.1990.110240
Filename
110240
Link To Document