Title :
Micro electro-discharge machining and its applications
Author :
Masaki, Takeshi ; Kawata, Koichi ; Masuzawa, Takahisa
Author_Institution :
Matsushita Res. Inst. Tokyo Inc., Kanagawa, Japan
Abstract :
A micro electro-discharge machining (MEDM) technology is presented. It allows machining of micro holes and shafts as small as 5 μm in diameter with a best surface roughness of 0.1 μm R max and of roundness of 0.5 μm, as well as a variety of complex shapes of equivalent accuracy. In the MEDM, machining for silicon with 10-100 Ω-cm resistivity is possible; machining up to a depth of 10 times the electrode diameter is easy, and the electrode wear is small. A prototype microair turbine of 2.2 mm external diameter, which is able to rotate at a speed of approximately 1000 r.p.m., is discussed
Keywords :
spark machining; surface topography; MEDM; Si; electrode wear; micro electro-discharge machining; micro holes; microair turbine; roundness; surface roughness; Conductivity; Electrodes; Machining; Prototypes; Rough surfaces; Shafts; Shape; Silicon; Surface roughness; Turbines;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110240
