DocumentCode
2566478
Title
Prototype micro-valve actuator
Author
Busch, John ; Johnson, A.
Author_Institution
TiNi Alloy Co., Oakland, CA, USA
fYear
1990
fDate
11-14 Feb 1990
Firstpage
40
Lastpage
41
Abstract
An experimental demonstration of a millimeter-scale actuator using a sputter-deposited film of shape-memory alloy is presented. A membrane of the shape-memory film was prepared, securely held, and then displaced by pneumatic pressure. By applying a low-voltage electrical pulse to cause actuation, the membrane was able to work against the pneumatic load and exhibit two-state behavior
Keywords
electric actuators; shape memory effects; sputtered coatings; electric actuators; low-voltage electrical pulse; membrane; micro-valve actuator; millimeter-scale actuator; pneumatic pressure; shape-memory alloy; sputter-deposited film; two-state behavior; Actuators; Biomembranes; Capacitive sensors; Heat recovery; Low voltage; Microvalves; Prototypes; Shape memory alloys; Temperature distribution; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Napa Valley, CA
Type
conf
DOI
10.1109/MEMSYS.1990.110244
Filename
110244
Link To Document