Title :
Prototype micro-valve actuator
Author :
Busch, John ; Johnson, A.
Author_Institution :
TiNi Alloy Co., Oakland, CA, USA
Abstract :
An experimental demonstration of a millimeter-scale actuator using a sputter-deposited film of shape-memory alloy is presented. A membrane of the shape-memory film was prepared, securely held, and then displaced by pneumatic pressure. By applying a low-voltage electrical pulse to cause actuation, the membrane was able to work against the pneumatic load and exhibit two-state behavior
Keywords :
electric actuators; shape memory effects; sputtered coatings; electric actuators; low-voltage electrical pulse; membrane; micro-valve actuator; millimeter-scale actuator; pneumatic pressure; shape-memory alloy; sputter-deposited film; two-state behavior; Actuators; Biomembranes; Capacitive sensors; Heat recovery; Low voltage; Microvalves; Prototypes; Shape memory alloys; Temperature distribution; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110244
