Ferroelectric thin films

Summary form only given. A very wide range of both vapor- and liquid-phase deposition techniques were applied to produce crystalline films of composition in a lead zirconate:lead titanate solid solution system. At compositions close to the morphotropic phase boundary, a regimen which shows excellent piezoelectric properties in the bulk ceramic films with high permittivity (ε₃₃-1350ε ₀) at room temperature and large switchable electric polarization (P_r~35 μC/cm²) were fabricated by several groups. Progress toward the use of ferroelectric films, in combination with silicon micromachining, for a wide range of piezoelectric microsensors, micro-actuators and micromotors is reviewed. In view of the very high electric strength alternative electrorestrictive electromechanical coupling appears attractive