DocumentCode
2569869
Title
Parameters of the Plasma Produced at the Surface of a Ferroelectric Cathode by Different Driving Pulses
Author
Chirko, K. ; Peleg, O. ; Gurovich, V. ; Krasik, Ya E. ; Bernshtam, V.
Author_Institution
Dept. of Phys., Technion, Haifa
fYear
2005
fDate
20-23 June 2005
Firstpage
215
Lastpage
215
Abstract
Summary form only given. Spectroscopic investigations of the properties of the plasma produced by a ferroelectric plasma source are presented. The plasma electron density and electron and ion temperature near the ferroelectric surface were determined from spectral line intensities and broadenings. The density of neutrals in the vicinity of the FPS surface, determined by analyses of neutral atom emission lines accounting opacity effect, was found to be ~1016 cm-3 . It was shown that the plasma electron density depends on the method of driving pulses application. The latter determines the gas and plasma ambience and the direction of the electron flow with respect to the plasma. Three different methods of the plasma formation were tested and results are compared. It was shown that the plasma electron density depends on the method of driving pulses application. Maximal plasma density up to 1015 cm-3 is achieved when the electrons attached to the ferroelectric surface by the driving electric field are released from the surface owing to driving pulse sharp decay and ionize heavy atoms desorbed from the ceramic. A mechanism controlling the density of the surface plasma is suggested. This mechanism relates to the surface density of bounded polarization charges which in it turn depends on the driving electric field and the ferroelectric sample properties. It was found that the product of the average plasma density ne and the thickness of the plasma layer h in an incomplete surface discharge relates to the bound polarization charge surface density as sigma = ehne. This relation was verified by the data obtained in the experiments
Keywords
glow discharges; ionisation; opacity; plasma density; plasma diagnostics; plasma flow; plasma sources; plasma temperature; plasma-wall interactions; spectral line broadening; spectral line intensity; surface discharges; electron flow; electron temperature; ferroelectric cathode; ion temperature; neutral atom emission lines; opacity; plasma electron density; plasma source; polarization charge surface density; spectral line broadenings; spectral line intensities; surface discharge; Cathodes; Electrons; Ferroelectric materials; Plasma applications; Plasma density; Plasma properties; Plasma sources; Plasma temperature; Polarization; Surface discharges;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location
Monterey, CA
ISSN
0730-9244
Print_ISBN
0-7803-9300-7
Type
conf
DOI
10.1109/PLASMA.2005.359258
Filename
4198517
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