Title :
Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting
Author :
Weng, Yung-Jin ; Weng, Yung-Chun ; Wong, Yong-Cheng ; Yang, Sen-Yeu ; Liu, Hsu-Kang
Author_Institution :
Center for Gen. Educ., Kainan Univ., Taoyuan, Taiwan
Abstract :
A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature.
Keywords :
magnetic particles; nanolithography; optical waveguides; soft lithography; PDMS flexible mold magnetic powder method; electromagnetic Plate uniform control pressing technology; electromagnetic assisted nanoimprinting; optical waveguide devices; polymethylmethacrylate; soft lithography; Electromagnetic devices; Electromagnetic scattering; Electromagnetic waveguides; Magnetic devices; Nanoscale devices; Optical device fabrication; Optical devices; Optical waveguides; Powders; Soft lithography; Electromagnetic control technology; Nanoimprinting technolog; magnetic powder; magnetic- flexible mold; optical waveguide;
Conference_Titel :
2009 International Conference on Signal Processing Systems
Conference_Location :
Singapore
Print_ISBN :
978-0-7695-3654-5
DOI :
10.1109/ICSPS.2009.179
