Title :
Fabrication of silicon optical scanner for laser display
Author :
Jong-min Kim ; Young-Chul Ko ; Do-Hyun Kong ; Jong-min Kim ; Ki Bang Lee ; Duk-Young Jeon
Author_Institution :
Display Lab., Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
A new fabrication process of vertically driven electrostatic scanner for laser display is presented. This scanner is composed of two structures having vertical combs. The combs are etched by ICP RIE and assembled by eutectic bonding aligner
Keywords :
display devices; electrostatic actuators; elemental semiconductors; light valves; micro-optics; micromachining; mirrors; optical deflectors; optical fabrication; optical projectors; optical scanners; silicon; sputter etching; wafer bonding; ICP RIE; Si; eutectic bonding; fabrication process; flip chip; laser display; linear actuation; micromirror; projection display; silicon optical scanner; vertical combs; vertically driven electrostatic scanner; Assembly; Bonding; Displays; Electrodes; Etching; Glass; Laser theory; Optical device fabrication; Optical sensors; Silicon;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879604
