DocumentCode
2573707
Title
High-selectivity single-chip spectrometer for operation at visible wavelengths
Author
Correia, J.H. ; Bartek, M. ; Wolffenbuttel, R.F.
fYear
1998
fDate
6-9 Dec. 1998
Firstpage
467
Lastpage
470
Abstract
A micro-spectrometer has been realized based on an array of Fabry-Perot thin-film optical resonators. The 16 channel micro-spectrometer is IC fabrication compatible and operates in the visible spectral range with an inter-channel shift of 6 nm. Each of the channels is sensitive in a single peak with FWHM of 16 nm. A FWHM <2 nm and finesse of 40 for narrowband operation is demonstrated.
Keywords
Fabry-Perot resonators; micro-optics; optical arrays; optical films; visible spectrometers; Fabry-Perot thin-film optical resonator array; IC fabrication; micro-spectrometer; selectivity; single-chip visible spectrometer; Fabrication; Fabry-Perot; Instruments; Mirrors; Optical arrays; Optical filters; Optical resonators; Photodiodes; Silver; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-4774-9
Type
conf
DOI
10.1109/IEDM.1998.746399
Filename
746399
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