Title :
An advanced flash memory technology on SOI
Author :
Burnett, D. ; Shum, D. ; Baker, K.
Author_Institution :
NVM Technol. Center, Motorola Inc., Austin, TX, USA
Abstract :
For the first time, EEPROM functionality is demonstrated on double-poly bitcells on SOI using the same layout as standard bulk CMOS bitcells. By using FN tunneling for program and erase (P/E) operations, the P/E characteristics of the floating-body SOI bitcell are comparable to the bulk CMOS characteristics. Bitcell endurance for SOI cells show significantly less window closure than bulk CMOS cells. High-voltage SOI device characteristics are also compared with bulk devices. With sufficient body contacts, the high-voltage SOI devices can support the required bitcell voltages.
Keywords :
CMOS memory circuits; flash memories; semiconductor device breakdown; silicon-on-insulator; tunnelling; EEPROM functionality; FN tunneling; HV SOI device characteristics; Si; advanced flash memory technology; bitcell endurance; body contacts; double-poly bitcells; erase characteristics; floating-body SOI bitcell; program characteristics; CMOS technology; Degradation; EPROM; Electrons; Flash memory; Hot carriers; Nonvolatile memory; Silicon; Tunneling; Voltage;
Conference_Titel :
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4774-9
DOI :
10.1109/IEDM.1998.746519