Title :
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated Kapton substrates
Author :
Kleiner, Alexander ; Suchaneck, G. ; Dejneka, A. ; Jastrabik, L. ; Lavrentiev, V. ; Kiselev, D.A. ; Gerlach, G.
Author_Institution :
Tech. Univ. Dresden, Dresden, Germany
Abstract :
Large area film deposition was performed by means of multitarget reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr) onto Cu-coated Kapton HN substrates. High-power pulse sputtering has been employed for the Zr-target (or alternatively for the Ti-target). Film composition profiles were evaluated by XPS and RBS. Piezoelectric properties were investigated by PFM.
Keywords :
Rutherford backscattering; X-ray photoelectron spectra; lead compounds; nanofabrication; nanostructured materials; piezoelectric thin films; sputter deposition; PFM; PZT; PZT-containing mixed oxide thin films; RES; XPS; copper-coated kapton substrates; high-power pulse sputtering; large area film deposition; multitarget reactive magnetron sputtering; piezoelectric properties; size 200 nm; Substrates; X-ray scattering; Complex oxide film deposition; PZT; composition profile; flexible polymer substrate; multitarget reactive sputtering; piezoresponse force microscopy;
Conference_Titel :
Oxide Materials for Electronic Engineering (OMEE), 2014 IEEE International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4799-5960-0
DOI :
10.1109/OMEE.2014.6912320
