Title :
Dielectric Planarization Using Mn203 Slurry
Author :
Kishii, S. ; Nakamura, K. ; Anmoto
Author_Institution :
Fujitsu Laboratories Limited 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
Conference_Titel :
VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
Print_ISBN :
4-930813-75-1
DOI :
10.1109/VLSIT.1997.623678
