Title :
Compliant electro-thermal microactuators
Author :
Jonsmann, J. ; Sigmund, O. ; Bouwstra, S.
Author_Institution :
Mikroelektronik Centret, Tech. Univ., Lyngby, Denmark
Abstract :
This paper describes design, microfabrication and characterisation of topology optimised compliant electro-thermal microactuators. The actuators are fabricated by a fast prototyping process using laser micromachining and electroplating. Actuators are characterised with respect to displacement, force and work, by use of image analysis. Four different actuators are presented. These actuators are capable of displacements of 30 /spl mu/m and forces of 15 mN. The most recent actuator designs function in reasonable accordance with design predictions.
Keywords :
electroplating; laser beam machining; microactuators; micromachining; moulding; rapid prototyping (industrial); sputter etching; 2D microactuators; Joule heating; RIE; SEM image analysis; compliant electrothermal microactuators; convection model; design; displacement; electroplating; fast prototyping process; force; laser micromachining; microfabrication; silicon mold; thermal expansion; topology optimised; work; Actuators; Algorithm design and analysis; Conducting materials; Constraint optimization; Design optimization; Electrodes; Force measurement; Microactuators; Springs; Topology;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746894
