A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

Author

Mochida, Y. ; Tamura, M. ; Ohwada, K.

Author_Institution

Murata Mfg. Co. Ltd., Yokohama, Japan

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

618

Lastpage

623

Abstract

We investigated the mechanical coupling between the drive and detection modes of micromachined vibrating rate gyroscopes, and designed and fabricated a gyroscope with a new structure to reduce the coupling. The coupling of the oscillator was measured using a new measurement system with a two-dimensional laser displacement meter. The oscillations were found to have an elliptical motion due to the coupling. When the frequency mismatch was reduced by means of electrostatic frequency tuning with a DC bias voltage, the coupling increased. The new structure, which has independent beams for the drive and detection modes, exhibited weaker coupling; and the resolution was 0.07 deg/sec at a bandwidth of 10 Hz.

Keywords

Coriolis force; finite element analysis; gyroscopes; micromachining; micromechanical resonators; microsensors; tuning; 2D laser displacement meter; Coriolis force; DC bias voltage; FEA; SOI; comb electrodes; detection mode; drive mode; electrostatic frequency tuning; elliptical motion; frequency mismatch reduction; independent beams; mechanical coupling; micromachined vibrating rate gyroscope; oscillator coupling; resonant frequencies; Displacement measurement; Electrostatic measurements; Frequency; Gyroscopes; Laser beams; Laser modes; Laser tuning; Optical coupling; Oscillators; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746899

Filename

746899