Nanomaterials fabrication using advanced thin film deposition and nanohybrid process

With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nano-template. Metallic nanomaterials were synthesized by highly conformal ALD Ru and anodic aluminum oxide (AAO) nano-template as well as by spontaneous formation during plasma enhanced ALD Co. Also, using SCFD with high gap fill properties, Ru nanoparticles and RuO₂ nanorod were fabricated. Finally, using self-assembled diblock copolymer as a template, ordered array of SiGe nanodots were fabricated by employing SEG.