• DocumentCode
    2579986
  • Title

    A Novel Low-temperature Gate Oxynitride For CMOS Technologies

  • Author

    Diaz, C. ; Cox, M. ; Greene, W. ; Perlaki, F. ; Carr, E. ; Manna, I. ; Bayoumi, A. ; Cao, M. ; Shamma, N. ; Tavassoli, M. ; Chi, C. ; Farrar, N. ; Lefforge, D. ; Chang, Y. ; Langley, B. ; Marcoux, P.

  • Author_Institution
    ULSI Research Lab., tMaterials Characterization Lab., 1 Integrated Circuits Business Division Hewlett-Packard Co., 3500 Deer Creek Road, Palo Alto, CA 94304
  • fYear
    1997
  • fDate
    10-12 June 1997
  • Firstpage
    49
  • Lastpage
    50
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on
  • Print_ISBN
    4-930813-75-1
  • Type

    conf

  • DOI
    10.1109/VLSIT.1997.623689
  • Filename
    623689
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2579986