Author :
Diaz, C. ; Cox, M. ; Greene, W. ; Perlaki, F. ; Carr, E. ; Manna, I. ; Bayoumi, A. ; Cao, M. ; Shamma, N. ; Tavassoli, M. ; Chi, C. ; Farrar, N. ; Lefforge, D. ; Chang, Y. ; Langley, B. ; Marcoux, P.
Author_Institution :
ULSI Research Lab., tMaterials Characterization Lab., 1 Integrated Circuits Business Division Hewlett-Packard Co., 3500 Deer Creek Road, Palo Alto, CA 94304